Octagon-Shaped 2-D Micromachined Thermal Wind Sensor for...

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Journal of Microelectromechanical Systems 2018

Octagon-Shaped 2-D Micromachined Thermal Wind Sensor for High-Accurate Applications

Ye, Yizhou, Yi, Zhenxiang, Gao, Shixuan, Qin, Ming, Huang, Qing-An
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Year:
2018
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2018.2849086
File:
PDF, 3.17 MB
english, 2018
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