Effect of Oxygen Flow Rate on the Optical, Electrical, and...

Effect of Oxygen Flow Rate on the Optical, Electrical, and Mechanical Properties of DC Sputtering ITO Thin Films

Tien, Chuen-Lin, Lin, Hong-Yi, Chang, Chih-Kai, Tang, Chien-Jen
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Volume:
2018
Year:
2018
Language:
english
Journal:
Advances in Condensed Matter Physics
DOI:
10.1155/2018/2647282
File:
PDF, 1.56 MB
english, 2018
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