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Analysis of Conduction and Charging Mechanisms in Atomic Layer Deposited Multilayered HfO 2 /Al 2 O 3 Stacks for Use in Charge Trapping Flash Memories
Novkovski, Nenad, Paskaleva, Albena, Skeparovski, Aleksandar, Spassov, DenchoVolume:
2018
Year:
2018
Language:
english
Journal:
Advances in Condensed Matter Physics
DOI:
10.1155/2018/3708901
File:
PDF, 1.75 MB
english, 2018