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Structural and Optical Properties of Amorphous Al 2 O 3 Thin Film Deposited by Atomic Layer Deposition
Shi, Shuzheng, Qian, Shuo, Hou, Xiaojuan, Mu, Jiliang, He, Jian, Chou, XiujianVolume:
2018
Year:
2018
Language:
english
Journal:
Advances in Condensed Matter Physics
DOI:
10.1155/2018/7598978
File:
PDF, 4.12 MB
english, 2018