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Low-pressure N 2 microplasma treatment for substrate surface cleaning prior to GaN selective growth
Kusakabe, Yasuhiro, Sugiyama, Hayata, Takenaka, Shun, Suzuki, Yohei, Maruyama, Takahiro, Naritsuka, Shigeya, Shimizu, KazuoVolume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.085501
Date:
August, 2018
File:
PDF, 2.11 MB
english, 2018