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Influence of sputtering pressure on microstructure and layer properties of iridium thin films
Büttner, A., Probst, A.-C., Emmerich, F., Damm, C., Rellinghaus, B., Döhring, T., Stollenwerk, M.Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.06.056
Date:
July, 2018
File:
PDF, 12.92 MB
english, 2018