Connection between target poisoning and current waveforms in reactive high power impulse magnetron sputtering of chromium
Layes, Vincent, Corbella Roca, Carles, Monje, Sascha, Schulz-von der Gathen, Volker, von Keudell, Achim, de los Arcos, TeresaLanguage:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/aad0e2
Date:
July, 2018
File:
PDF, 552 KB
english, 2018