Optical emission spectroscopy for the determination of electron energy distribution function in a He-Ar glow discharge plasma.
YAMAMOTO, Manabu, SATO, Takeshi, TAKUBO, YoshitakaVolume:
38
Year:
1989
Language:
english
Journal:
Journal of the Spectroscopical Society of Japan
DOI:
10.5111/bunkou.38.300
File:
PDF, 449 KB
english, 1989