Direct writing of metal film via sputtering of micromachined electrodes
Abdul-Wahed, Ahmed M., Roy, Anindya L., Xiao, Zhiming, Takahata, KenichiLanguage:
english
Journal:
Journal of Materials Processing Technology
DOI:
10.1016/j.jmatprotec.2018.06.028
Date:
June, 2018
File:
PDF, 1.51 MB
english, 2018