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Precision Engineering 2018 / 6

A heterodyne interferometer constructed in an integrated optics and its metrological evaluation of a picometre-order periodic error

Yokoyama, Shuko, Hori, Yasuaki, Yokoyama, Toshiyuki, Hirai, Akiko
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Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2018.04.020
Date:
June, 2018
File:
PDF, 1.51 MB
english, 2018
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