Methods for Nonlinearities Reduction in Micromechanical...

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Journal of Microelectromechanical Systems 2018

Methods for Nonlinearities Reduction in Micromechanical Beams Resonators

Chen, Dongyang, Wang, Yong, Guan, Yangyang, Chen, Xuying, Liu, Xinxin, Xie, Jin
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Year:
2018
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2018.2850766
File:
PDF, 5.70 MB
english, 2018
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