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Influence of Deposition Temperature and Source Gas in PE-CVD for SiO₂ Passivation on Performance and Reliability of In-Ga-Zn-O Thin-Film Transistors
Aman, S. G. Mehadi, Koretomo, Daichi, Magari, Yusaku, Furuta, MamoruYear:
2018
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2018.2841978
File:
PDF, 2.07 MB
english, 2018