Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 07 Vol. 36; Iss. 4
![](/img/cover-not-exists.png)
High temperature capacitors using AlN grown by MBE as the dielectric
Ghosh, Pijush K., Sarollahi, Mirsaeid, Li, Chen, White, Thomas, Debu, Desalegn T., Yan, Qigeng, Kuchuk, Andrian, Kumar, Rahul, Shetty, Satish, Salamo, Gregory J., Ware, Morgan E.Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5033931
Date:
July, 2018
File:
PDF, 1.31 MB
english, 2018