High aspect ratio anisotropic silicon etching for x-ray...

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High aspect ratio anisotropic silicon etching for x-ray phase contrast imaging grating fabrication

Finnegan, Patrick S., Hollowell, Andrew E., Arrington, Christian L., Dagel, Amber L.
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Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.06.013
Date:
June, 2018
File:
PDF, 2.24 MB
english, 2018
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