Fabrication of microlens array on 6H-SiC mold by an integrated microcutting-etching process
Zhou, Tianfeng, Xu, Ruzhen, Ruan, Benshuai, Liang, Zhiqiang, Wang, XibinLanguage:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2018.06.008
Date:
June, 2018
File:
PDF, 1.36 MB
english, 2018