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Microstructure evolution and grain orientation in ITO targets and their effects on the film characteristics
Mei, Fangsheng, Yuan, Tiechui, Li, Ruidi, Qin, Kai, Huang, JingweiLanguage:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-018-9598-7
Date:
July, 2018
File:
PDF, 6.93 MB
english, 2018