Wide range investigation of duty cycle and frequency effects on bipolar magnetron sputtering of chromium nitride
Haye, Emile, Colaux, Julien L., Moskovkin, Pavel, Pireaux, Jean-Jacques, Lucas, StéphaneVolume:
350
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2018.07.009
Date:
September, 2018
File:
PDF, 3.90 MB
english, 2018