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Discharge parameters and plasma characterization in a dc magnetron with liquid Cu target
Kaziev, Andrey V., Tumarkin, Alexander V., Leonova, Kseniya A., Kolodko, Dobrynya V., Kharkov, Maxim M., Ageychenkov, Dmitry G.Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.07.001
Date:
July, 2018
File:
PDF, 1.40 MB
english, 2018