Micromechanical resonator with dielectric nonlinearity
Mateen, Farrukh, Boales, Joseph, Erramilli, Shyamsunder, Mohanty, PritirajVolume:
4
Language:
english
Journal:
Microsystems & Nanoengineering
DOI:
10.1038/s41378-018-0013-6
Date:
December, 2018
File:
PDF, 982 KB
english, 2018