AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Source and beam performance improvement for carbon implantation with carbon monoxide (CO) gas
Tang, Ying, Chambers, Barry, Yedave, Sharad, Sergi, Steve, Sweeney, Joseph, Despres, Joseph, Bishop, SteveYear:
2012
Language:
english
DOI:
10.1063/1.4766551
File:
PDF, 341 KB
english, 2012