The annealing effects on the micro-structure and properties...

Journal of Applied Physics 2016 / 09 Vol. 120; Iss. 9

The annealing effects on the micro-structure and properties of RuMoC films as seedless barrier for advanced Cu metallization

Zou, Jianxiong, Liu, Bo, Jiao, Guohua, Lu, Yuanfu, Dong, Yuming, Li, Qiran
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Volume:
120
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4962011
Date:
September, 2016
File:
PDF, 2.31 MB
english, 2016
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