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Monolithic IPD-MEMS Technology and Its Applications to High-Q Switched Capacitor Banks and Variable True-Time Delay Networks
Wong, Ka Wai, Mansour, Raafat R.Year:
2018
Language:
english
Journal:
IEEE Transactions on Components, Packaging and Manufacturing Technology
DOI:
10.1109/TCPMT.2018.2853595
File:
PDF, 1023 KB
english, 2018