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[ASME 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems - Clear Water Bay, Kowloon, Hong Kong (Tuesday 3 June 2008)] 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems - Fabrication of SiC MEMS Pressure Sensor Based on Novel Vacuum-Sealed Method
Wang, Chao, Geng, Xiaobao, Zhang, HaixiaYear:
2008
Language:
english
DOI:
10.1115/MicroNano2008-70136
File:
PDF, 396 KB
english, 2008