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Ultrafine aluminum oxide powder prepared by chemical vapor deposition of trimethylaluminum
Kwang Ho Kim, C. H. Ho, Tae-Gyo Suh, S. Prakash, R. F. BunshahVolume:
13
Language:
english
Pages:
7
DOI:
10.1007/bf02834178
Date:
September, 1991
File:
PDF, 1.71 MB
english, 1991