![](/img/cover-not-exists.png)
Effect of roughness of substrate and sputtering power on the properties of TiN coatings deposited by magnetron sputtering
Xiao, Weiwei, Deng, Hua, Zou, Shuliang, Ren, Yuhong, Tang, Dewen, Lei, Ming, Xiao, Changfei, Zhou, Xi, Chen, YaoLanguage:
english
Journal:
Journal of Nuclear Materials
DOI:
10.1016/j.jnucmat.2018.07.011
Date:
July, 2018
File:
PDF, 1.90 MB
english, 2018