Impact of Stripe Trench-Gate Structure for 4H-SiC Trench...

Materials Science Forum 2018 / 6 Vol. 924

Impact of Stripe Trench-Gate Structure for 4H-SiC Trench MOSFET with Bottom Oxide Protection Layer

Fukui, Yutaka, Sugawara, Katsutoshi, Adachi, Kohei, Hatta, Hideyuki, Konishi, Kazuya, Sadamatsu, Koji, Fujiwara, Nobuo, Tomohisa, Shingo, Yamakawa, Satoshi
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Volume:
924
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.924.761
Date:
June, 2018
File:
PDF, 460 KB
english, 2018
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