Structural evolution of thermal annealed Si(0 0 1) surface...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2018 / 09 Vol. 431

Structural evolution of thermal annealed Si(0 0 1) surface layers fabricated by plasma immersion He + implantation

Lomov, Andrey A., Shcherbachev, Kirill D., Miakonkikh, Andrey V., Chesnokov, Yury M., Kiselev, Dmitry A.
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Volume:
431
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2018.06.024
Date:
September, 2018
File:
PDF, 2.49 MB
english, 2018
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