Impact of negative oxygen ions on the deposition processes...

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Thin Solid Films 2018 / 7

Impact of negative oxygen ions on the deposition processes of RF-magnetron sputtered SrTiO 3 thin films

Hadj Youssef, A., Ambriz Vargas, F., Amaechi, I., Sarkissian, A., Merlen, A., Thomas, R., Ruediger, A.
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.05.054
Date:
July, 2018
File:
PDF, 12.07 MB
english, 2018
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