[ACS Symposium Series] Polymers in Microlithography Volume...

  • Main
  • [ACS Symposium Series] Polymers in...

[ACS Symposium Series] Polymers in Microlithography Volume 412 (Materials and Processes) || Quantitative Analysis of a Laser Interferometer Waveform Obtained During Oxygen Reactive-Ion Etching of Thin Polymer Films

Reichmanis, Elsa, MacDonald, Scott A., Iwayanagi, Takao
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
10.1021/bk
Year:
1989
Language:
english
DOI:
10.1021/bk-1989-0412.ch014
File:
PDF, 1.27 MB
english, 1989
Conversion to is in progress
Conversion to is failed