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[ACS Symposium Series] Polymers in Microlithography Volume 412 (Materials and Processes) || Quantitative Analysis of a Laser Interferometer Waveform Obtained During Oxygen Reactive-Ion Etching of Thin Polymer Films
Reichmanis, Elsa, MacDonald, Scott A., Iwayanagi, TakaoVolume:
10.1021/bk
Year:
1989
Language:
english
DOI:
10.1021/bk-1989-0412.ch014
File:
PDF, 1.27 MB
english, 1989