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Creation of film-free freestanding 3D microstructures by aligned mask micromolding
Li, Hui, Stephens, L Scott, Trinkle, Christine AVolume:
28
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aabc86
Date:
August, 2018
File:
PDF, 1.21 MB
english, 2018