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[IEEE 2018 7th International Symposium on Next Generation Electronics (ISNE) - Taipei, Taiwan (2018.5.7-2018.5.9)] 2018 7th International Symposium on Next Generation Electronics (ISNE) - Radio-frequency magnetron sputtering deposited ZnO-based TFBAR for humidity sensor applications
Lin, Chun-Cheng, Lin, Chun-Ting, Chu, Sheng-YuanYear:
2018
Language:
english
DOI:
10.1109/ISNE.2018.8394629
File:
PDF, 719 KB
english, 2018