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Impact of the sequence of precursor introduction on the growth and properties of atomic layer deposited Al-doped ZnO films
Le Tulzo, Harold, Schneider, Nathanaelle, Lincot, Daniel, Patriarche, Gilles, Donsanti, FrédériqueVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5030990
Date:
July, 2018
File:
PDF, 2.70 MB
english, 2018