In-situ X-ray Microscopy of Crack-Propagation to Study Fracture Mechanics of On-Chip Interconnect Structures
Kutukova, Kristina, Liao, Zhongquan, Werner, Stephan, Guttmann, Peter, Standke, Yvonne, Gluch, Jürgen, Schneider, Gerd, Zschech, EhrenfriedLanguage:
english
Journal:
MRS Advances
DOI:
10.1557/adv.2018.410
Date:
April, 2018
File:
PDF, 1023 KB
english, 2018