[ACS Symposium Series] Polymeric Materials for Microelectronic Applications Volume 579 (Science and Technology) || Surface Imaging Using Photoinduced Acid-Catalyzed Formation of Polysiloxanes at Air—Polymer Interface
Ito, Hiroshi, Tagawa, Seiichi, Horie, KazuyukiVolume:
10.1021/bk
Year:
1995
Language:
english
DOI:
10.1021/bk-1994-0579.ch015
File:
PDF, 1.55 MB
english, 1995