A dual-driving piezoelectric DETF resonator with high...

Journal of Micromechanics and Microengineering 2018 / 10 Vol. 28; Iss. 10

A dual-driving piezoelectric DETF resonator with high quality factor and low multimode effect

Liu, Xinxin, Wang, Yixiang, Le, Xianhao, Xu, Zhonggui, Wu, Changju, Xie, Jin
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Volume:
28
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aacd2e
Date:
October, 2018
File:
PDF, 2.44 MB
english, 2018
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