Ultra-thin TiO 2 films by atomic layer deposition and...

Materials Science in Semiconductor Processing 2018 / 11 Vol. 87

Ultra-thin TiO 2 films by atomic layer deposition and surface functionalization with Au nanodots for sensing applications

Lupan, Oleg, Postica, Vasile, Ababii, Nicolai, Reimer, Tim, Shree, Sindu, Hoppe, Mathias, Polonskyi, Oleksandr, Sontea, Victor, Chemnitz, Steffen, Faupel, Franz, Adelung, Rainer
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Volume:
87
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.06.031
Date:
November, 2018
File:
PDF, 3.49 MB
english, 2018
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