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High Packing Density, High Speed CMOS (Hi-CMOS) Device Technology
Sakai, Yoshio, Masuhara, Toshiaki, Minato, Osamu, Hashimoto, NorikazuVolume:
18
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAPS.18S1.73
Date:
January, 1979
File:
PDF, 736 KB
1979