Deep-UV photoinduced chemical patterning at the micro- and nanoscale for directed self-assembly
Leuschel, Benjamin, Gwiazda, Agnieszka, Heni, Wajdi, Diot, Frédéric, Yu, Shang-Yu, Bidaud, Clémentine, Vonna, Laurent, Ponche, Arnaud, Haidara, Hamidou, Soppera, OlivierVolume:
8
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/s41598-018-28196-1
Date:
December, 2018
File:
PDF, 2.50 MB
english, 2018