Development of a tomographic Mueller-matrix scatterometer...

Review of Scientific Instruments 2018 / 07 Vol. 89; Iss. 7

Development of a tomographic Mueller-matrix scatterometer for nanostructure metrology

Tan, Yinyin, Chen, Chao, Chen, Xiuguo, Du, Weichao, Gu, Honggang, Liu, Shiyuan
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Volume:
89
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5034440
Date:
July, 2018
File:
PDF, 1.36 MB
english, 2018
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