Levitating Micro-Actuators: A Review
Poletkin, Kirill, Asadollahbaik, Asa, Kampmann, Ronald, Korvink, JanVolume:
7
Language:
english
Journal:
Actuators
DOI:
10.3390/act7020017
Date:
April, 2018
File:
PDF, 564 KB
english, 2018