Overview of 3D Micro- and Nanocoordinate Metrology at PTB

Dai, Gaoliang, Neugebauer, Michael, Stein, Martin, Bütefisch, Sebastian, Neuschaefer-Rube, Ulrich

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Volume:

Language:

english

Journal:

Applied Sciences

DOI:

10.3390/app6090257

Date:

September, 2016

File:

PDF, 5.07 MB

english, 2016

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