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Overview of 3D Micro- and Nanocoordinate Metrology at PTB
Dai, Gaoliang, Neugebauer, Michael, Stein, Martin, Bütefisch, Sebastian, Neuschaefer-Rube, UlrichVolume:
6
Language:
english
Journal:
Applied Sciences
DOI:
10.3390/app6090257
Date:
September, 2016
File:
PDF, 5.07 MB
english, 2016