Impact on the Gas Barrier Property of Silicon Oxide Films...

Applied Sciences 2017 / 01 Vol. 7; Iss. 1

Impact on the Gas Barrier Property of Silicon Oxide Films Prepared by Tetramethylsilane-Based PECVD Incorporating with Ammonia

Liu, Hua-Wen, Chen, Tai-Hong, Chang, Chun-Hao, Lu, Shao-Kai, Lin, Yi-Cyuan, Liu, Day-Shan
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Volume:
7
Language:
english
Journal:
Applied Sciences
DOI:
10.3390/app7010056
Date:
January, 2017
File:
PDF, 3.08 MB
english, 2017
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