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TiCl4 Barrier Process Engineering in Semiconductor Manufacturing
Luoh, Tuung, Huang, Yu-Kai, Hung, Yung-Tai, Yang, Ling-Wuu, Yang, Ta-Hone, Chen, Kuang-ChaoVolume:
6
Language:
english
Journal:
Coatings
DOI:
10.3390/coatings6010002
Date:
January, 2016
File:
PDF, 3.75 MB
english, 2016