Silicides and Nitrides Formation in Ti Films Coated on Si...

Coatings 2017 / 02 Vol. 7; Iss. 2

Silicides and Nitrides Formation in Ti Films Coated on Si and Exposed to (Ar-N2-H2) Expanding Plasma

Jauberteau, Isabelle, Mayet, Richard, Cornette, Julie, Mangin, Denis, Bessaudou, Annie, Carles, Pierre, Jauberteau, Jean, Passelergue, Armand
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Volume:
7
Language:
english
Journal:
Coatings
DOI:
10.3390/coatings7020023
Date:
February, 2017
File:
PDF, 2.53 MB
english, 2017
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