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Ta–Zr–N Thin Films Fabricated through HIPIMS/RFMS Co-Sputtering
Chang, Li-Chun, Chang, Ching-Yen, You, Ya-WenVolume:
7
Language:
english
Journal:
Coatings
DOI:
10.3390/coatings7110189
Date:
November, 2017
File:
PDF, 5.79 MB
english, 2017