Chemical-Mechanical Impact of Nanoparticles and pH Effect...

Lubricants 2017 / 05 Vol. 5; Iss. 2

Chemical-Mechanical Impact of Nanoparticles and pH Effect of the Slurry on the CMP of the Selective Layer Surfaces

Ilie, Filip, Ipate, George
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Volume:
5
Language:
english
Journal:
Lubricants
DOI:
10.3390/lubricants5020015
Date:
May, 2017
File:
PDF, 2.74 MB
english, 2017
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