Reduction of Defects in AlGaN Grown on Nanoscale-Patterned...

Materials 2017 / 05 Vol. 10; Iss. 6

Reduction of Defects in AlGaN Grown on Nanoscale-Patterned Sapphire Substrates by Hydride Vapor Phase Epitaxy

Tasi, Chi-Tsung, Wang, Wei-Kai, Tsai, Tsung-Yen, Huang, Shih-Yung, Horng, Ray-Hua, Wuu, Dong-Sing
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Volume:
10
Language:
english
Journal:
Materials
DOI:
10.3390/ma10060605
Date:
May, 2017
File:
PDF, 4.91 MB
english, 2017
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