Substrate-Influenced Thermo-Mechanical Fatigue of Copper Metallizations: Limits of Stoney’s Equation
Bigl, Stephan, Wurster, Stefan, Cordill, Megan, Kiener, DanielVolume:
10
Language:
english
Journal:
Materials
DOI:
10.3390/ma10111287
Date:
November, 2017
File:
PDF, 1.95 MB
english, 2017