Effect of Growth Temperature on the Structural and Electrical Properties of ZrO2 Films Fabricated by Atomic Layer Deposition Using a CpZr[N(CH3)2]3/C7H8 Cocktail Precursor
An, Jong-Ki, Chung, Nak-Kwan, Kim, Jin-Tae, Hahm, Sung-Ho, Lee, Geunsu, Lee, Sung, Lee, Taehoon, Park, In-Sung, Yun, Ju-YoungVolume:
11
Language:
english
Journal:
Materials
DOI:
10.3390/ma11030386
Date:
March, 2018
File:
PDF, 3.51 MB
english, 2018