Single-Crystal Y2O3 Epitaxially on GaAs(001) and (111)...

Materials 2015 / 10 Vol. 8; Iss. 10

Single-Crystal Y2O3 Epitaxially on GaAs(001) and (111) Using Atomic Layer Deposition

Lin, Y., Cheng, C., Chen, K., Fu, C., Chang, T., Hsu, C., Kwo, J., Hong, M.
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Volume:
8
Language:
english
Journal:
Materials
DOI:
10.3390/ma8105364
Date:
October, 2015
File:
PDF, 1.88 MB
english, 2015
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